8e Colloque international sur les procédés plasma, 10-14 juin 1991, Antibes-Juan-Les-Pins, FranceLe Vide, les couches minces. 1991, Vol 47, Num 256, issn 0223-4335, SUPConference Proceedings

Transmetteur de mesure de pression partielle 600 A = Partial pressure measure transmitterMARTIN, B.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 390-392, issn 0223-4335, SUPConference Paper

Particle contamination in plasma processus : formation, detection and process concernsSELWYN, G. S.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 129-136, issn 0223-4335, SUPConference Paper

Optimisation du positionnement d'un substrat dans un système de dépôt par cation ionique = Optimization of substrate positioning in a ionic cation deposition systemWERNER, M.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 338-340, issn 0223-4335, SUPConference Paper

Assistance ionique : RF, Kaufman, ECR ou gridless = Ionic assistance: RF, Kaufman, ECR or gridlessLe Vide, les couches minces. 1991, Vol 47, Num 256, pp 404-405, issn 0223-4335, SUPConference Paper

New hard coatings grown from physical vapor deposition techniques : properties and industrial applicationsCOLL, B. F.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 155-170, issn 0223-4335, SUPConference Paper

Dispositif de chauffage des substrats dans les installations de dépôts sous vide = Device for substrate heating in vacuum deposition installationsJACQUES, F.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 398-400, issn 0223-4335, SUPConference Paper

Perspectives en gravure sèche des nouveaux réacteurs plasma : applications à la microélectronique = Future prospects in dry etching of new plasma reactorsPECCOUD, L.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 76-84, issn 0223-4335, SUPConference Paper

Microelectronics detox systemsPROUST, N.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 65-72, issn 0223-4335, SUPConference Paper

Active and passive spectroscopy in plasma deposition and plasma etchingSCHRAM, D. C.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 1-8, issn 0223-4335, SUPConference Paper

Evolution des générateurs micro-ondes plasma = Evolution of microwave plasma generatorsBERNARD, J. P.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 393-394, issn 0223-4335, SUPConference Paper

Thin film tri-electrode electroluminescent displayPORADA, Z. W.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 344-346, issn 0223-4335, SUPConference Paper

Thin films amorphous semiconductors for light and radiation detectionEQUER, B.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 192-200, issn 0223-4335, SUPConference Paper

Réalisation d'équipements de gravure et pulvérisation avec des changements de procédés entièrement automatisés grâce à la nouvelle ligne de générateurs de RF plasma products = Realization of etching and sputtering equipments with entirely automatized process changes owing to new class of generators of RF PLASMA PRODUCTSTUFFIN, G.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 395-397, issn 0223-4335, SUPConference Paper

L'épitaxie et la passivation des composés III - V, Plestin-les-Grèves, 24-26 avril 1990 = Epitaxy and passivation of III-V compounds, Plestin-les-Grèves, 24-26 April 1990Le Vide, les couches minces. 1990, Vol 45, Num 251, issn 0223-4335, 97 p.Conference Proceedings

Dry-etching monitoring of III-V heterostructures using laser reflectometry and optical emission spectroscopyCOLLOT, P; DIALLO, T.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 368-370, issn 0223-4335, SUPConference Paper

Numerical simulation of the effect of ion beam assistance on the structure and properties on thin C filmsANDRE, B; ROSSI, F.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 35-37, issn 0223-4335, SUPConference Paper

Analysis of an ECR-plasmaNEUMANN, G; KNAPP, H.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 59-61, issn 0223-4335, SUPConference Paper

Investigation of ECR discharge mechanisms based on the study of surface-wave-sustained magnetoplasmas : a systematic approachMARGOT, J; MOISAN, M.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 47-58, issn 0223-4335, SUPConference Paper

Spatially and time-resolved optical emission spectroscopy of silane and helium RF dischargesBÖHM, C; PERRIN, J.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 286-288, issn 0223-4335, SUPConference Paper

Influence de la température sur la structure et la texture de couches de TiN obtenues par pulvérisation cathodique magnetron = Effect of temperature on structure and texture of TiN layers obtained by magnetron cathodic sputteringCOMBADIERE, L; MACHET, J.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 186-188, issn 0223-4335, SUPConference Paper

Electron energy spectra at a negatively biased electrode in a sputtering dischargeJOUAN, P. Y; LEMPERIERE, G.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 271-273, issn 0223-4335, SUPConference Paper

Growth conditions, structure and properties of amorphous hydrogenated carbon films prepared by ion platingBEWILOGUA, K; RAU, B.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 216-222, issn 0223-4335, SUPConference Paper

Plasma deposition of SiO₂ from TEOS and mixtures of TEOS with O₂ and rare gasesGARCIA, P; CATHERINE, Y.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 201-203, issn 0223-4335, SUPConference Paper

Water vapour permeability and structure of plasma polymerized ethyleneTAKAHASHI, N; PELISSIER, V.Le Vide, les couches minces. 1991, Vol 47, Num 256, pp 356-358, issn 0223-4335, SUPConference Paper